Features & Benefits
 

• The MacLite Junior Series 2-Stage transfer machine transfers 25-each Silicon Wafers between one 25-slot Cassette and one 25-slot process boat.Carriers/boats can be plastic, Teflon®, Quartz,Silicon Carbide, Polysilicon and metal boats.
• Fast & Smooth automatic transfer featuring ramped speeds. A 25-wafer transfer in less than 45 seconds.
• Operator interface is with a 12 key keypad with a 4 line LCD display.
• Stage shifts left and right for easy loading and unloading of carriers and boats.
• MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
• Clean operation introduces less than 1.5 particles greater than .23 micron diameter, per wafers per transfer.
• Single Board PC controlled.
• Sensors detect wafers and cassette or process carrier presence for safety.
• Flat/Notch alignment is maintained during transfer.
• Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
• Pressure sensors are used on the lift system and platform to prevent both personnel and wafer damage during transfer.
• All exposed aluminum parts are Anodized for corrosion protection.
• Covers are powder-coated aircraft grade aluminum.
• All bearings are clean room rated.
• Uptime will exceed 99.95%.
• MTBF (mean time between failure): 2,500 hours
• MTBA (mean time between assist): 1,000 hours
• MTTR (mean time to repair): 1 hour

Options

• Vespel package for high temperature applications
• Stainless steel covers.
• Hot Wafer/Boat Sensor